Multi‐Step Chemical Solution Deposition‐Annealing Process Toward Wake‐Up Free Ferroelectricity in Y:HfO 2 Films
Author:
Affiliation:
1. School of Materials Science and Engineering Gwangju Institute of Science and Technology Gwangju 61005 Korea
2. Department of Materials Science and Engineering Korea Advanced Institute of Science and Technology Daejeon 34141 Korea
Funder
National Research Foundation of Korea
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admi.202100907
Reference58 articles.
1. Ferroelectric Hf0.5Zr0.5O2 Thin Films: A Review of Recent Advances
2. A study on the wake-up effect of ferroelectric Hf0.5Zr0.5O2films by pulse-switching measurement
3. Effect of Zr Content on the Wake-Up Effect in Hf1–xZrxO2 Films
4. Physical Mechanisms behind the Field-Cycling Behavior of HfO2 -Based Ferroelectric Capacitors
5. Wake-up effects in Si-doped hafnium oxide ferroelectric thin films
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4. Control of Ferroelectricity in Solution‐Processed Hafnia Films Through Annealing Atmosphere;Advanced Electronic Materials;2024-05-23
5. Effects of annealing conditions on structural and ferroelectric properties of CeO2-HfO2 solid solution thin films on InAs substrates fabricated by chemical solution deposition;Journal of Alloys and Compounds;2023-12
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