1. State Key Laboratory of Crystal Materials Institute of Novel Semiconductors Institute of Crystal Materials Shandong University Jinan Shandong 250100 China
2. Shenzhen Research Institute of Shandong University Shenzhen 518057 China
3. School of Microelectronics Shandong University Jinan Shandong 250100 China
4. Shandong Research Institute of Industrial Technology Jinan 250100 China