Improved Endurance of Ferroelectric Hf x Zr 1–x O 2 Integrated on InAs Using Millisecond Annealing
Author:
Affiliation:
1. Electrical and Information Technology Lund University Box 118 Lund 22 100 Sweden
2. NanoLund, Lund University Box 118 Lund 22 100 Sweden
3. Division of Synchrotron Radiation Research Lund University Box 118 Lund 22 100 Sweden
Funder
Crafoordska Stiftelsen
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admi.202201038
Reference47 articles.
1. Review and perspective on ferroelectric HfO2-based thin films for memory applications
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