1. Department of Electrical Engineering and AutomationSchool of Electrical EngineeringAalto University P.O. Box 11000 FI-00076 Finland
2. COMP Centre of Excellence in Computational Nanoscience, Department of Applied PhysicsAalto University P.O. Box 11000 FI-00076 Finland
3. Department of Materials Science and EngineeringSchool of Chemical TechnologyAalto University P.O. Box 11000 FI-00076 Finland
4. Department of Bioprocesses and BiosystemsSchool of Chemical TechnologyAalto University P.O. Box 11000 FI-00076 Finland
5. Center for Advanced Plasma Surface TechnologySungkyunkwan University 300 Cheoncheon-dong, Jangan-gu, Suwon-si, Gyeonggi-do South Korea