Room‐Temperature Micropillar Growth of Lithium–Titanate–Carbon Composite Structures by Self‐Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries-Reference-Cited by-同舟云学术

Room‐Temperature Micropillar Growth of Lithium–Titanate–Carbon Composite Structures by Self‐Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries

Published:2019-08-12 Issue:42 Volume:29 Page:1904306
ISSN:1616-301X
Container-title:Advanced Functional Materials
language:en
Short-container-title:Adv. Funct. Mater.

Author:

Etula Jarkko¹^ORCID,Lahtinen Katja¹,Wester Niklas¹,Iyer Ajai¹,Arstila Kai²,Sajavaara Timo²,Kallio Tanja¹,Helmersson Ulf³,Koskinen Jari¹

Affiliation:

1. Department of Chemistry and Materials ScienceAalto University School of Chemical Engineering 02150 Espoo Finland

2. Department of PhysicsUniversity of Jyväskylä 40500 Jyväskylä Finland

3. Department of PhysicsLinköping University SE‐581 83 Linköping Sweden

Funder

Academy of Finland

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adfm.201904306

Reference59 articles.

1. High‐rate sputtering of aluminum for metallization of integrated circuits

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5. A structure zone diagram including plasma-based deposition and ion etching

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