Magnetron sputtering: a review of recent developments and applications
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference66 articles.
1. Sputter Deposition;Rossnagel,1995
2. High‐rate sputtering of aluminum for metallization of integrated circuits
3. Planar magnetron sputtering
4. Charged particle fluxes from planar magnetron sputtering sources
5. Unbalanced dc magnetrons as sources of high ion fluxes
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