Identifying, Resolving, and Quantifying Anisotropy in ReS2 Nanomechanical Resonators

Author:

Xu Bo1ORCID,Zhu Jiankai1ORCID,Xiao Fei1,Jiao Chenyin1,Liang Yachun1,Wen Ting1,Wu Song1,Zhang Zejuan1,Lin Lin2,Pei Shenghai1,Jia Hao3,Chen Ying3,Ren Ziming4,Wei Xueyong4,Huang Wen2,Xia Juan1ORCID,Wang Zenghui15ORCID

Affiliation:

1. Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China Chengdu 610054 P. R. China

2. Yangtze Delta Region Institute (Huzhou) University of Electronic Science and Technology of China Huzhou 313001 P. R. China

3. State Key Lab of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 P. R. China

4. State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an 710049 P. R. China

5. State Key Laboratory of Electronic Thin Films and Integrated Devices University of Electronic Science and Technology of China Chengdu 610054 P. R. China

Abstract

AbstractAs an emerging two‐dimensional semiconductor, rhenium disulfide (ReS2) is renowned for its strong in‐plane anisotropy in electrical, optical, and thermal properties. In contrast to the electrical, optical, optoelectrical, and thermal anisotropies that are extensively studied in ReS2, experimental characterization of mechanical properties has largely remained elusive. Here, it is demonstrated that the dynamic response in ReS2 nanomechanical resonators can be leveraged to unambiguously resolve such disputes. Using anisotropic modal analysis, the parameter space for ReS2 resonators in which mechanical anisotropy is best manifested in resonant responses is determined. By measuring their dynamic response in both spectral and spatial domains using resonant nanomechanical spectromicroscopy, it is clearly shown that ReS2 crystal is mechanically anisotropic. Through fitting numerical models to experimental results, it is quantitatively determined that the in‐plane Young's moduli are 127 and 201 GPa along the two orthogonal mechanical axes. In combination with polarized reflectance measurements, it is shown that the mechanical soft axis aligns with the Re‐Re chain in the ReS2 crystal. These results demonstrate that dynamic responses in nanomechanical devices can offer important insights into intrinsic properties in 2D crystals and provide design guidelines for future nanodevices with anisotropic resonant responses.

Funder

National Natural Science Foundation of China

Ministry of Science and Technology of the People's Republic of China

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

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