Analysis of liquid materials in low vacuum with Wet-SIMS

Author:

Seki Toshio12,Fujii Makiko3,Kusakari Masakazu1,Nakagawa Shunichiro1,Aoki Takaaki42,Matsuo Jiro32

Affiliation:

1. Department of Nuclear Engineering; Kyoto University; Uji 611-0011 Kyoto Japan

2. CREST; Japan Science and Technology Agency (JST); Chiyoda 102-0075 Tokyo Japan

3. Quantum Science and Engineering Center; Kyoto University; Uji 611-0011 Kyoto Japan

4. Department of Electronic Science and Engineering; Kyoto University; Nishikyo 615-8510 Kyoto Japan

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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1. Innovative Technologies in Advanced SIMS : Toward Organic and Biological Material Analysis;Vacuum and Surface Science;2021-10-10

2. MeV-SIMS measurement of lithium-containing electrolyte;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2020-09

3. Secondary ion mass spectrometry measurements under ambient and humid conditions using MeV ions;Journal of Vacuum Science & Technology B;2020-05

4. Development of Low-vacuum SIMS instruments with large cluster Ion beam;Surface and Interface Analysis;2016-09-15

5. Development of ambient SIMS using mega-electron-volt-energy ion probe;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-05

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