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Development of Low-vacuum SIMS instruments with large cluster Ion beam

  • Published:2016-09-15 Issue:11 Volume:48 Page:1119-1121
  • ISSN:0142-2421
  • Container-title:Surface and Interface Analysis
  • language:en
  • Short-container-title:Surf. Interface Anal.

Author:

Suzuki K.1,Kusakari M.1,Fujii M.2,Seki T.13,Aoki T.43,Matsuo J.23

Affiliation:

1. Department of Nuclear Engineering; Kyoto University; Uji, 611-0011 Kyoto Japan

2. Quantum Science and Engineering Center; Kyoto University; Uji, 611-0011 Kyoto Japan

3. SENTAN, Japan Science and Technology Agency (JST); Chiyoda 102-0075 Tokyo Japan

4. Department of Electronic Science and Engineering; Kyoto University; Nishikyo 615-8510 Kyoto Japan

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mass spectrometry imaging for environmental sciences: A review of current and future applications;Trends in Environmental Analytical Chemistry;2024-06

2. Double-step gas cluster ion beam smoothing;Acta Physica Sinica;2021

3. Mass Spectrometry Imaging: A Review of Emerging Advancements and Future Insights;Analytical Chemistry;2017-12-13

4. Cross sections of X-ray production induced on Ti, Fe, Zn, Nb and Ta by O, Cl, Cu and Br ions with energies between 4 MeV and 40 MeV;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-11
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