Synchrotron radiation-stimulated photochemical reaction and its application to semiconductor processes
Author:
Publisher
Wiley
Subject
Inorganic Chemistry,General Chemistry
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1. Direct, etching of GaAs Crystal Excited by a Vacuum Ultraviolet Lamp;Chinese Physics Letters;2003-01-23
2. BURST REACTION OF THIN FILMS EXCITED BY HIGH-FLUX SOFT X-RAYS;Surface Review and Letters;2002-02
3. Energy and polarization control in synchrotron-radiation-stimulated nanoprocess;SPIE Proceedings;1999-11-16
4. Annealing and Synchrotron Radiation Irradiation Effects on Hydrogen Terminated Si(100) Surfaces Investigated by Infrared Reflection Absorption Spectroscopy;Japanese Journal of Applied Physics;1998-12-30
5. Ultrahigh-Vacuum Reaction Apparatus to Study Synchrotron-Radiation-Stimulated Processes;Journal of Synchrotron Radiation;1998-11-01
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