Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference13 articles.
1. International Technology Roadmap for Semiconductors (2001 edition). http://public.itrs.net/.
2. BCR-564, IRMM, IRMM: Geel, Belgium.
3. NIST Ellipsometry SRMs 2531 to 2536. Office of Reference Materials, NIST: Gaithersburg, MD 20899, USA.
4. SiO[sub 2] thickness determination by x-ray photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, Rutherford backscattering, transmission electron microscopy, and ellipsometry
Cited by
42 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献