Cracking study of pentakis(dimethylamino)tantalum vapors by Knudsen cell mass spectrometry
Author:
Publisher
Wiley
Subject
Organic Chemistry,Spectroscopy,Analytical Chemistry
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1. Chemical vapor deposition growth and properties of TaCxNy
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1. Knudsen effusion mass spectrometry: Current and future approaches;Rapid Communications in Mass Spectrometry;2024-05-14
2. Area-Selective Deposition of Tantalum Nitride with Polymerizable Monolayers: From Liquid to Vapor Phase Inhibitors;Chemistry of Materials;2022-03-24
3. Doping Mechanism in Transparent, Conducting Tantalum Doped ZnO Films Deposited Using Atomic Layer Deposition;Advanced Materials Interfaces;2016-09-29
4. Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-01
5. Developments of TaN ALD Process for 3D Conformal Coatings;Chemical Vapor Deposition;2011-12
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