Remote Microwave PECVD for Continuous, Wide-Area Coating Under Atmospheric Pressure
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Reference17 articles.
1. Linear Extended ArcJet-CVD - a New PECVD Approach for Continuous Wide Area Coating Under Atmospheric Pressure
2. Flammenpyrolytische Silikatbeschichtung bei Normaldruck als Alternative zu VakuumverfahrenCombustion CVD of silica as an alternative method to vakuum treatment
3. Growth of Thin Films of Molybdenum and Tungsten Oxides by Combustion CVD Using Aqueous Precursor Solutions
4. Plasma-enhanced chemical-vapour-deposition of thin films by corona discharge at atmospheric pressure
5. SiO2thin film deposition by radio frequency oxygen plasma enhanced laser ablation from Si
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