Plasma-enhanced chemical-vapour-deposition of thin films by corona discharge at atmospheric pressure-Reference-Cited by-同舟云学术

Plasma-enhanced chemical-vapour-deposition of thin films by corona discharge at atmospheric pressure

Published:1997-12 Issue:1-3 Volume:97 Page:426-434
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Thyen R,Weber A,Klages C.-P

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference12 articles.

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4. U. Kogelschatz, B. Eliasson, Ozone Generation and Applications, in: Handbook of Electrostatic Processes, Marcel Dekker, New York, 1995, Kap. 26, pp. 581–605.

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