A Review of Simulation Modeling of the State Evaluation and Process Prediction of Plasma Processing under Atmospheric Pressure

Abstract

AbstractIn recent decades, interest in simulation modeling of plasma processing under atmospheric pressure has been growing because of its appealing advantages across various domains. These advantages encompass the provision of diverse data types for evaluating processing states, the capability to predict processing outcomes from current operating conditions, and cost-effectiveness in comparison to experimental methods. This paper endeavors to offer a concise review of the evolution of simulation modeling of atmospheric plasma processing. This review encompasses foundational concepts and methodologies of plasma generation modeling of both thermal and nonthermal plasmas, progressing to discuss the framework and challenges of plasma processing modeling. In addition, a brief overview of contemporary challenges in modeling, such as simplifying complex physics, designing computational domains, and optimizing the balance between computational precision and cost, is provided to foster the advancement of atmospheric plasma processing modeling.