1. Electronic Materials Research Laboratory Key Laboratory of the Ministry of Education & International Center for Dielectric Research School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology Xi'an Jiaotong University Xi'an 710049 China
2. State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences 865 Changning Road Shanghai 200050 China
3. Key Laboratory of Microelectronics Device and Integrated Technology The Institute of Microelectronics of Chinese Academy of Sciences Beijing 100029 China
4. University of Chinese Academy of Sciences Beijing 100049 China
5. The State Key Laboratory for Manufacturing Systems Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology Xi'an Jiaotong University Xi'an 710049 China
6. Leibniz‐Institut für Kristallzüchtung Max‐Born‐Straße 2 12489 Berlin Germany
7. Key Laboratory of Physical Electronics and Devices Ministry of Education School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an 710049 China
8. Department of Chemistry and 4D LABS Simon Fraser University Burnaby British Columbia V5A 1S6 Canada