High speed and high reliability phase transition via constrained crystallization in ultrathin a-C/Sb2Te multilayer nanostructures

Abstract

Operation speed, data retention, thickness variation, and resistance drift are main shortages for conventional Ge2Sb2Te5 based phase change memory (PCM). In this Letter, we propose a type of ultrathin amorphous carbon (a-C)/Sb2Te multilayer nanostructures with semiconductor process compatibility, which has high speed and excellent reliability in terms of data retention (131 °C for 10-year), thickness variation (1.52%), and resistance drift (0.0095). The PCM devices based on [a-C (1 nm)/Sb2Te (7 nm)]5 multilayer nanostructures exhibit a fast operation speed of 5 ns. The SET/RESET resistance ratio remains constant over 105 cycles by more than two orders of magnitude. The excellent performance of a-C/Sb2Te multilayer nanostructures makes it a promising storage medium to expand the applications of PCM, such as automotive electronics.