Surface Morphology and Microstructure of Pulsed DC Magnetron Sputtered Piezoelectric AlN and AlScN Thin Films-Reference-Cited by-同舟云学术

Surface Morphology and Microstructure of Pulsed DC Magnetron Sputtered Piezoelectric AlN and AlScN Thin Films

Published:2017-11-13 Issue:9 Volume:215 Page:1700559
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Lu Yuan¹^ORCID,Reusch Markus¹,Kurz Nicolas¹²,Ding Anli¹,Christoph Tim¹,Kirste Lutz¹,Lebedev Vadim¹,Žukauskaitė Agnė¹

Affiliation:

1. Fraunhofer Institute for Applied Solid State Physics IAF; Tullastraße 72 79108 Freiburg Germany

2. Laboratory for Compound Semiconductor Microsystems IMTEK-Department of Microsystems Engineering University of Freiburg; Georges-Koehler-Allee 103 79110 Freiburg Germany

Funder

Fraunhofer Attract

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices

2. Piezoelectric properties of polycrystalline AlN thin films for MEMS application

3. Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality

4. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

5. Increased electromechanical coupling in w−ScxAl1−xN

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