Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis-Reference-Cited by-同舟云学术

Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis

Published:2015-02-04 Issue:3 Volume:212 Page:523-528
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Hönicke Philipp¹,Detlefs Blanka²,Müller Matthias¹,Darlatt Erik¹,Nolot Emmanuel²,Grampeix Helen²,Beckhoff Burkhard¹

Affiliation:

1. Physikalisch-Technische Bundesanstalt (PTB); Abbestr. 2-12 10587 Berlin Germany

2. CEA-LETI; 17 rue des Martyrs 38054 Grenoble France

Funder

European Metrology Research Programme (EMRP) Projects NEW01-TReND

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201400204/fullpdf

Reference30 articles.

1. Reference-free X-ray spectrometry based on metrology using synchrotron radiation

2. Reference-Free Total Reflection X-ray Fluorescence Analysis of Semiconductor Surfaces with Synchrotron Radiation

3. A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies

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