Time-Resolved Diagnostics of Dual High Power Impulse Magnetron Sputtering With Pulse Delays of 15 µs and 500 µs
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ctpp.201000065/fullpdf
Reference37 articles.
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3. The growth process of plasma-deposited ITO films investigated by grazing incidence X-ray techniques
4. Planar magnetron sputtering
5. Planar magnetron sputtering
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