Dynamics and Electronegativity of Oxygen RF Plasmas
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ctpp.201200048/fullpdf
Reference43 articles.
1. Plasma chemistry and surface processes of negative ions
2. A novel approach for negative ion analysis using 160 GHz microwave interferometry and laser photodetachment in oxygen cc-rf plasmas
3. Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas
4. Attachment-induced ionization instability of a radio frequency excited discharge in oxygen
5. Electron Density Oscillations in CC-RF Oxygen Plasma Investigated by Gaussian Beam Microwave Interferometry
Cited by 30 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges;Plasma Sources Science and Technology;2023-04-01
2. Electron power absorption mode transition in capacitively coupled Ar/CF4 discharges: hybrid modeling investigation;Journal of Physics D: Applied Physics;2022-02-21
3. 2D Particle-in-cell simulations of charged particle dynamics in geometrically asymmetric low pressure capacitive RF plasmas;Plasma Sources Science and Technology;2021-08-01
4. 2D particle-in-cell simulations of geometrically asymmetric low-pressure capacitive RF plasmas driven by tailored voltage waveforms;Plasma Sources Science and Technology;2021-05-01
5. Atomic oxygen generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and O2;Journal of Physics D: Applied Physics;2021-01-20
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3