Excitation Mechanisms and Sheath Dynamics in Capacitively Coupled Radio-Frequency Oxygen Plasmas
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ctpp.201000038/fullpdf
Reference32 articles.
1. Discharge singlet oxygen generator for oxygen–iodine laser: I. Experiments with rf discharges at 13.56 and 81 MHz
2. Sheath dynamics observed in a 13.56 MHz-driven plasma
3. Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy
4. Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy
5. Determination of quenching coefficients in a hydrogen RF discharge by time-resolved optical emission spectroscopy
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