The role of plasma analytics in leading-edge semiconductor technologies
Author:
Affiliation:
1. Chemnitz University of Technology; Chemnitz Germany
2. Fraunhofer Institute for Electronic Nano Systems (ENAS); Chemnitz Germany
3. Leibniz Institute for Plasma Science and Technology (INP Greifswald); Greifswald Germany
Publisher
Wiley
Subject
Condensed Matter Physics
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