Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films
Author:
Affiliation:
1. Electrical Engineering and Plasma Technology; Ruhr-University Bochum; Universitätsstraße 150 44780 Bochum Germany
2. Chemical Engineering and Macromolecular Chemistry; University of Paderborn; Warburgerstraße 100 33098 Paderborn Germany
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.201500085/fullpdf
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