Special issue: Plasmas for microfabrication-Reference-Cited by-同舟云学术

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Special issue: Plasmas for microfabrication

Published:2019-08-13 Issue:9 Volume:16 Page:1990001
ISSN:1612-8850
Container-title:Plasma Processes and Polymers
language:en
Short-container-title:Plasma Process Polym

Author:

Hamaguchi Satoshi¹,Agarwal Sumit²,Zajickova Lenka³,Wertheimer Michael R.⁴

Affiliation:

1. Hamaguchi Laboratory, Center for Atomic and Molecular Technologies, Graduate School of EngineeringOsaka University Osaka Japan

2. Department of Chemical and Biological EngineeringColorado School of Mines Golden Colorado

3. Plasma Technologies, Central European Institute for Technology (CEITEC)Masaryk University Brno Czech Republic

4. Department of Engineering PhysicsPolytechnique Montréal Montreal Canada

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.201990001

Reference14 articles.

1. MEMS at Bosch – Si plasma etch success story, history, applications, and products

2. Plasma techniques in the production of customized MEMS‐applications

3. Evolution of photoresist layer structure and surface morphology under fluorocarbon‐based plasma exposure

4. Utilizing surface modification in plasma‐enhanced cyclic etching of tantalum nitride to surpass lithographic limits

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Introductory Chapter: Progress of Plasma Physics and Allied Technologies in Daily Life Applications;Advancements in Fine Particle Plasmas;2024-03-13

2. Optical beaming of electrical discharges;Nature Communications;2020-10-20

3. Particle formation during deposition of SiO x nanostructured thin films by atmospheric pressure plasma jet;Japanese Journal of Applied Physics;2020-03-05

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