Particle formation during deposition of SiO x nanostructured thin films by atmospheric pressure plasma jet
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
https://iopscience.iop.org/article/10.35848/1347-4065/ab72ca/pdf
Reference55 articles.
1. Atmospheric-pressure plasma technology
2. Cold atmospheric plasma: Sources, processes, and applications
3. Non-thermal atmospheric pressure discharges for surface modification
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