Defect Mitigation in Area‐Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns
Author:
Affiliation:
1. Department of ChemistryKU Leuven (University of Leuven) Celestijnenlaan 200F 3001 Leuven Belgium
2. Imec Kapeldreef 75 3001 Leuven Belgium
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admi.201900896
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