Discrete, Shallow Doping of Semiconductors via Cylinder‐Forming Block Copolymer Self‐Assembly-Reference-Cited by-同舟云学术

Discrete, Shallow Doping of Semiconductors via Cylinder‐Forming Block Copolymer Self‐Assembly

Published:2022-05 Issue:9 Volume:307 Page:2200155
ISSN:1438-7492
Container-title:Macromolecular Materials and Engineering
language:en
Short-container-title:Macro Materials & Eng

Author:

Zhang Yuanyi¹^ORCID,Danielsen Scott P. O.¹^ORCID,Popere Bhooshan C.¹,Heitsch Andrew T.²,Li Mingqi³,Trefonas Peter³,Segalman Rachel A.¹⁴^ORCID,Katsumata Reika⁵^ORCID

Affiliation:

1. Department of Chemical Engineering University of California Santa Barbara CA 93106 USA

2. The Dow Chemical Company Lake Jackson TX 77566 USA

3. DuPont Electronics & Industrial Marlborough MA 01752 USA

4. Materials Department and Material Research Laboratory University of California Santa Barbara CA 93106 USA

5. Polymer Science and Engineering Department University of Massachusetts Amherst Amherst MA 01003 USA

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Organic Chemistry,General Chemical Engineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/mame.202200155

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4. In Situ Patterning of Ultrasharp Dopant Profiles in Silicon

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