Growth of cubic (100) SrTiO3 thin films by plasma-enhanced chemical vapor deposition using a novel titanium precursor
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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3. CVD induced by ion beams for the preparation of oxide and nitride thin films;Le Journal de Physique IV;1999-09
4. Deposition conditions of SrTiO3 films on various substrates by CVD and their dielectric properties;Thin Solid Films;1998-12
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