High-Performance Amorphous InGaZnO Thin-Film Transistors via Staked Ultrathin High-k TaOxBuffer Layer Grown on Low-k SiO2Gate Oxide-Reference-Cited by-同舟云学术

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High-Performance Amorphous InGaZnO Thin-Film Transistors via Staked Ultrathin High-k TaOxBuffer Layer Grown on Low-k SiO2Gate Oxide

Published:2017-02-07 Issue:3 Volume:3 Page:1600452
ISSN:2199-160X
Container-title:Advanced Electronic Materials
language:en
Short-container-title:Adv. Electron. Mater.

Author:

Kang Tae Sung¹,Yoon Kap Soo²,Baek Gwang Ho³,Ko Won Bae¹,Yang Seung Mo¹,Yeon Bum Mo³,Hong Jin Pyo¹³

Affiliation:

1. Department of Physics; Research Institute of Natural Science; Hanyang University; Seoul 133-791 South Korea

2. IT Development Samsung Display; Cheonan-si Chungcheongnam-do 31454 South Korea

3. Division of Nanoscale Semiconductor Engineering; Hanyang University; Seoul 133-791 South Korea

Funder

Ministry of Trade, Industry and Energy

Industrial Technology Innovation Program

National Research Foundation of Korea

Ministry of Science ICT and Future Planning

Publisher

Wiley

Subject

Electronic, Optical and Magnetic Materials

Reference40 articles.

1. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors

2. UV-Visible Spectroscopic Analysis of Electrical Properties in Alkali Metal-Doped Amorphous Zinc Tin Oxide Thin-Film Transistors

3. Boost Up Mobility of Solution-Processed Metal Oxide Thin-Film Transistors via Confining Structure on Electron Pathways

4. Aqueous Combustion Synthesis of Aluminum Oxide Thin Films and Application as Gate Dielectric in GZTO Solution-Based TFTs

5. Electronic structure and transport properties in the transparent amorphous oxide semiconductor2CdO⋅GeO2

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2. Progress, Challenges, and Opportunities in Oxide Semiconductor Devices: A Key Building Block for Applications Ranging from Display Backplanes to 3D Integrated Semiconductor Chips;Advanced Materials;2023-01-10

3. High-performance a-IGZO-based flexible TTFT with stacked dielectric layers via ultrathin high-κ SrTiO3 buffer layer grown on HfO2;Journal of Materials Science: Materials in Electronics;2022-01

4. Facile fabrication of MgZnO/ZnO composites for high performance thin film transistor;Journal of Alloys and Compounds;2021-08

5. High-Performance Thin-Film Transistors with an Atomic-Layer-Deposited Indium Gallium Oxide Channel: A Cation Combinatorial Approach;ACS Applied Materials & Interfaces;2020-11-11

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