1. Microelectronic Systems Laboratory (LSM)Swiss Federal Institute of Technology (EPFL) Lausanne CH‐1015 Switzerland
2. Department of Applied Science and Technology (DISAT)Politecnico di Torino Turin 10129 Italy
3. Electroceramic Thin Films GroupSwiss Federal Institute of Technology (EPFL) Lausanne CH‐1015 Switzerland
4. Interdisciplinary Center for Electron MicroscopySwiss Federal Institute of Technology (EPFL) Lausanne CH‐1015 Switzerland