Improved depth resolution in Auger depth profiling of multilayered thin films by reactive ion sputtering-Reference-Cited by-同舟云学术

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Improved depth resolution in Auger depth profiling of multilayered thin films by reactive ion sputtering

Published:1979-02 Issue:1 Volume:1 Page:32-35
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Blattner R. J.,Nadel S.,Evans C. A.,Braundmeier A. J.,Magee Charles W.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference11 articles.

1. Depth resolution and surface roughness effects in sputter profiling of NiCr multilayer sandwich samples using Auger electron spectroscopy

2. and lon Implantation, Sputtering and Their Applications, Chap. 6. Academic Press, London (1976).

3. The behaviour of surfaces under ion bombardment

4. and CRC Crit. Rev. Solid State Sci. 561 (1974).

5. Depth-profiling of Cu-Ni sandwich samples by secondary ion mass spectrometry

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