Directed high‐χ block copolymer <scp>self‐assembly</scp> by laser writing on silicon substrate-Reference-Cited by-同舟云学术

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Directed high‐χ block copolymer self‐assembly by laser writing on silicon substrate

Published:2022-02-28 Issue:23 Volume:139 Page:52291
ISSN:0021-8995
Container-title:Journal of Applied Polymer Science
language:en
Short-container-title:J of Applied Polymer Sci

Author:

Jin Hyeong Min¹²^ORCID,Lee Su Eon³,Kim Simon³,Kim Ju Young⁴,Han Young‐Soo²,Kim Bong Hoon³

Affiliation:

1. Department of Organic Materials Engineering Chungnam National University Daejeon Republic of Korea

2. Neutron Science Center Korea Atomic Energy Research Institute (KAERI) Daejeon Republic of Korea

3. Department of Robotics and Mechatronics Engineering Daegu Gyeongbuk Institute of Science and Technology (DGIST) Daegu Republic of Korea

4. Reality Devices Research Division Electronics and Telecommunications Research Institute (ETRI) Daejeon Republic of Korea

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Surfaces, Coatings and Films,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/app.52291

Reference54 articles.

1. Block Copolymer Thermodynamics: Theory and Experiment

2. Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter

3. Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat

4. Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond

5. Strategies for Inorganic Incorporation using Neat Block Copolymer Thin Films for Etch Mask Function and Nanotechnological Application

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Transient, Reusable Top-Coats for the Vertical Orientation of High-χ Block Copolymers for Nanopatterning;ACS Applied Nano Materials;2023-09-11

2. Directed self‐assembly of block copolymer thin films via momentary thickness gradients;Journal of Polymer Science;2023-08-10

3. Liquid Phase Infiltration of Block Copolymers;Polymers;2022-10-14

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