Gas-Permeable Microimprint Template Derived from Cellulose Nanofiber Derivatives for Mechanical Properties

Abstract

A gas-permeable template has lower mechanical properties compared to non-gas-permeable metal templates. Therefore, it is difficult to mass-produce by increasing the area of the gas-permeable template. In this study, we have developed a new gas-permeable template with cellulose nanofiber (CNF) derivatives added to improve the mechanical properties of gas-permeable templates. The reinforcing effect by the CNF derivative added was investigated by a tensile test. As a result, it was shown that Young’s modulus was increased about 2 to 3 times by the addition of 2-5 wt% CNF derivative. Also, it was confirmed by confocal microscopic images that transferability and gas permeability of the gas-permeable template were not lost even when the CNF derivative was added.