Gas-Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing-Reference-Cited by-同舟云学术

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Gas-Permeable Cellulose Template for Reduction of Template Damage and Gas Trapping in Microimprint Lithography of High Volume Manufacturing

Published:2016-05-04 Issue:8 Volume:301 Page:902-906
ISSN:1438-7492
Container-title:Macromolecular Materials and Engineering
language:en
Short-container-title:Macromol. Mater. Eng.

Author:

Takei Satoshi¹,Nakajima Shinya¹,Sugahara Kigen¹,Hanabata Makoto¹,Matsumoto Yoko²,Sekiguchi Atsushi²

Affiliation:

1. Eco-material Engineering; Toyama Prefectural University; Imizu Toyama 939-0398 Japan

2. Litho Tech Japan Corporation; Saitama 332-0034 Japan

Funder

JSPS Grant-in-Aid for Scientific Research

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Organic Chemistry,General Chemical Engineering

Reference33 articles.

1. Characterization of 8-in. wafers printed by nanoimprint lithography

2. Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff

3. Large-Area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography: A Step toward High-Throughput Application of Continuous Nanoimprinting

4. Nanoimprint Lithography Based Approach for the Fabrication of Large-Area, Uniformly-Oriented Plasmonic Arrays

5. Nanoimprint lithography

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultraviolet-curable Material with High Fluorine Content for Biomimetic Functional Structures Achieved by Nanoimprint Lithography with Gas-permeable Template for Life Science and Electronic Applications;Journal of Photopolymer Science and Technology;2023-06-15

2. Fabrication of High-Resolution Fine Microneedles Derived from Hydrolyzed Hyaluronic Acid Gels in Vacuum Environment Imprinting Using Water Permeable Mold;Gels;2022-11-29

3. Thermal nanoimprint lithography of sodium hyaluronate solutions with gas permeable inorganic hybrid mold for cosmetic and pharmaceutical applications;Applied Physics Express;2022-03-21

4. A review on emerging biodegradable polymers for environmentally benign transient electronic skins;Journal of Materials Science;2021-07-19

5. Fabrication of nanostructured antibacterial film derived from oligoglucosamine in ultraviolet nanoimprint lithography using a solvent-permeable template;Applied Physics Express;2020-09-28

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