A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization

Author:

Zhang Wen1ORCID,Zhang Hui1ORCID,Jin Shijiu1ORCID,Zeng Zhoumo1ORCID

Affiliation:

1. State Key Laboratory of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, China

Abstract

Capacitive micromachined ultrasonic transducers (CMUTs) are one of the promising MEMS devices. This paper proposed an integrated vibration membrane structure to design a two-dimensional CMUT linear array for underwater applications. The operation frequencies for different medium have been calculated and simulated, which are 2.5 MHz in air and 0.7 MHz in water. The directivity analyses for the CMUT cell, subarray, and linear array have been provided. According to the product theorems, the directivity function of the complex array is obtained using a combination of the directivity functions of certain simple structures. Results show that the directivity of a CMUT cell is weak due to the small size, but the directivity of the designed linear array is very strong. Influential parameters of the linear array have been discussed, including the cell numbers, the adjacent distance, and the operation medium. In order to further suppress the side lobe interference and improve the resolution and the imaging quality of the imaging system, several weighting methods are used for optimization and comparison. Satisfactory side lobe suppression results are obtained, which can meet the actual requirements.

Funder

National Natural Science Foundation of China

Publisher

Hindawi Limited

Subject

Electrical and Electronic Engineering,Instrumentation,Control and Systems Engineering

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2. Ultrasound Non-Destructive Evaluation/Testing using Capacitive Micromachined Ultrasound Transducer (CMUT);2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS);2022-10-24

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4. Design and Experiment of Capacitive Micromachined Ultrasonic Transducer Array for High-frequency Underwater Imaging;Recent Advances in Electrical & Electronic Engineering (Formerly Recent Patents on Electrical & Electronic Engineering);2021-02-18

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