Three-dimensional micro electromechanical system piezoelectric ultrasound transducer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4772469
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4. Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method
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