Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices-Reference-Cited by-同舟云学术

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Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

Published:2025-01 Issue:1 Volume:11 Page:100849
ISSN:2352-8478
Container-title:Journal of Materiomics
language:en
Short-container-title:Journal of Materiomics

Author:

Zhang Xingxu^ORCID,Wu Hao,Zhang Yuhui,Luo Jian,Ye Tao,Tao Kai,Deng Jinjun,Ma Binghe,Yuan Weizheng

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Reference57 articles.

1. High-performance potassium sodium niobate piezoceramics for ultrasonic transducer;Zheng;Nano Energy,2020

2. A self-powered acoustic sensor excited by ultrasonic wave for detecting and locating underwater ultrasonic sources;Guan;Nano Energy,2022

3. Monolithic ultrasound fingerprint sensor;Jiang;Microsyst Nanoeng,2017

4. Zero-bending piezoelectric micromachined ultrasonic transducer (pMUT) with enhanced transmitting performance;Wang;J Microelectromech Syst,2015

5. Design, characterization, and analysis of PZT micromachined piezoelectric ultrasonic transducers with good coupling to solids;Xing;IEEE T Ultrason Ferr,2020

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