Design and Experiment of Capacitive Micromachined Ultrasonic Transducer Array for High-frequency Underwater Imaging

Author:

Yu Yuanyu1ORCID,Wang Jiujiang1ORCID,Liu Xin2ORCID,Pun Sio H.2ORCID,Qiu Weibao3,Zhang Shuang1ORCID,Cheng Ching H.4ORCID,Lei Kin F.5ORCID,Vai Mang I.2,Mak Peng U.6ORCID

Affiliation:

1. Data Recovery Key Laboratory of Sichuan Province, College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, China

2. State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China

3. Shenzhen Key Laboratory of Ultrasound Imaging and Therapy Paul C. Lauterbur Research Center for Biomedical Imaging Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China

4. School of Automotive Engineering, Wuhan University of Technology, Wuhan 430070, China

5. Graduate Institute of Biomedical Engineering, Chang Gung University, Taoyuan 33302, Taiwan

6. Faculty of Science and Technology, Department of Electrical and Computer Engineering, University of Macau, Macau 999078, China

Abstract

Background:: Ultrasound is widely used in the applications of underwater imaging. Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for the traditional piezoelectric ultrasonic transducer. In underwater ultrasound imaging, better resolutions can be achieved with a higher frequency ultrasound. Therefore, a CMUT array for high-frequency ultrasound imaging is proposed in this work. Methods:: Analytical methods were used to calculate the center frequency in water and the pull-in voltage for determining the operating point of CMUT. A finite element method model was developed to finalize the design parameters. The CMUT array was fabricated with a five-mask sacrificial release process. Results:: The CMUT array owned an immersed center frequency of 2.6 MHz with a 6 dB fractional bandwidth of 123 %. The pull-in voltage of the CMUT array was 85 V. An underwater imaging experiment was carried out with the target of three steel wires. Conclusion:: In this study, we have developed CMUT for high-frequency underwater imaging. The experiment showed that the CMUT could detect the steel wires with a diameter of 100 μm and the axial resolution was 0.582 mm, which was close to one wavelength of ultrasound in 2.6 MHz

Funder

the Sichuan province academic and Technical Leader Training

he Innovative Team Program of the Neijiang Normal University

Leading Talent Training Project of Neijiang Normal University

Foundation of Science and Technology of Neijiang Normal University

Foundation of Ph.D. Scientific Research of Neijiang Normal University

University of Macau

Science and Technology Development Fund, Macau SAR

Publisher

Bentham Science Publishers Ltd.

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

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1. Research on CMUTs Design with Different Cell Arrangements;Recent Patents on Engineering;2024-01

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