Influence of Weight Ratio of Poly(4-vinylphenol) Insulator on Electronic Properties of InGaZnO Thin-Film Transistor

Author:

Chiu C. J.1,Pei Z. W.2,Chang S. P.1,Chang S. J.1

Affiliation:

1. Institute of Microelectronics, and Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan 70101, Taiwan

2. Institute of Optoelectronic Engineering, Department of Electrical Engineering, National Chung Hsing University, Taichung 40227, Taiwan

Abstract

Spin-coated organic PVP layers were used as dielectric layers in a-IGZO TFTs. Weight ratios of 20 : 1, 10 : 1, and 5 : 1 for PVP and PMF, a cross-linking agent, were used. The a-IGZO TFTs with the PVP : PMF ratio of 20 : 1 showed a large hysteresis in theI-Vcurve andC-Vcurve, the hysteresis increases with the increase of hydroxyl groups and also deteriorated the gate leakage current. In contrast, the devices with the PVP : PMF ratio of 5 : 1 dielectric displayed only small hysteresis. According to our experimental results, preventing the possible diffusion of hydroxyl-contained species in polymeric dielectrics is a very important factor in improving the electrical properties of high-performance a-IGZO TFT devices.

Funder

National Science Council

Publisher

Hindawi Limited

Subject

General Materials Science

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