Low-temperature preparation and characteristics of top-gate thin-film transistors with La-ZTO active layers and polymethylmethacrylate dielectric layers

Abstract

Abstract A top-gate coplanar-structure thin-film transistor (TFT) combining the advantages of both a co-sputtered amorphous La-doped ZnSnO (a-La-ZTO) active layer and solution-based polymethylmethacrylate (PMMA) gate dielectric layer has been prepared under low temperature (100 °C) with low cost for the first time. The results indicate that the PMMA thin film demonstrates anti-reflection properties when it combines with a-La-ZTO layer to form a double-layer film, displaying high transparency to visible light of ∼90.3%. Moreover, it was found that the La target power during the deposition of a-La-ZTO film plays an important role in suppressing the formation of oxygen vacancies and adjusting the carrier concentration of a-La-ZTO active layer, thus impacting a-La-ZTO TFT performance. Overall, the optimum a-La-ZTO TFT with a La target power of 13.9 W, working in an n-channel enhancement mode, possesses a large saturated mobility (>10 cm2 (Vs)−1) and an on/off drain current ratio over 105.