Layout Hotspot Detection with Feature Tensor Generation and Deep Biased Learning
Author:
Affiliation:
1. CSE Department, The Chinese University of Hong Kong, NT, Hong Kong
2. ASML Brion Inc., CA, USA
Publisher
ACM
Link
https://dl.acm.org/doi/pdf/10.1145/3061639.3062270
Reference18 articles.
1. A Fuzzy-Matching Model With Grid Reduction for Lithography Hotspot Detection
2. Accurate process-hotspot detection using critical design rule extraction
3. Machine-learning-based hotspot detection using topological classification and critical feature extraction;Yu Y.-T.;IEEE TCAD,2015
4. Enabling online learning in lithography hotspot detection with information-theoretic feature optimization
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