Application of Machine Learning for Process Control in Semiconductor Manufacturing
Author:
Affiliation:
1. Hitachi ABB Power Grids Research, Universal Plaza, Jiuxianqiao, Beijing, China
2. Hitachi ABB Power Grids Research Universal Plaza, Jiuxianqiao, Beijing, China
Publisher
ACM
Reference15 articles.
1. a data mining approach to automate fault detection model development in the semiconductor manufacturing process;Kerdprasop Kittisak;International Journal of Mechanics, Issue,2011
2. Big Data Analytics for Smart Manufacturing: Case Studies in Semiconductor Manufacturing
3. Data mining for yield enhancement in semiconductor manufacturing and an empirical study
4. Bayesian inference for mining semiconductor manufacturing big data for yield enhancement and smart production to empower industry 4.0
5. Predictive Models for Equipment Fault Detection in the Semiconductor Manufacturing Process
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