Data mining for yield enhancement in semiconductor manufacturing and an empirical study

Author:

Chien Chen-Fu,Wang Wen-Chih,Cheng Jen-Chieh

Publisher

Elsevier BV

Subject

Artificial Intelligence,Computer Science Applications,General Engineering

Reference23 articles.

1. Data mining techniques for marketing, sales and customer support;Berry,1997

2. Business data mining—a machine learning perspective;Bose;Information & Management,2001

3. Mining business database;Brachman;Communication of ACM,1996

4. Data mining for improving a cleaning process in the semiconductor industry;Braha;IEEE Transactions on Semiconductor Manufacturing,2002

5. Classification and regression trees;Breiman,1984

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