A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems
Author:
Publisher
Elsevier BV
Reference65 articles.
1. Hybrid feature selection for wafer acceptance test parameters in semiconductor manufacturing;Xu;IEEE Access,2020
2. Fog-IBDIS: Industrial big data integration and sharing with fog computing for manufacturing systems;Wang;Engineering,2019
3. Data-driven adaptive virtual metrology for yield prediction in multibatch wafers;Xu;IEEE Trans Ind Inform,2022
4. Yield learning curve models in semiconductor manufacturing;Tirkel;IEEE Trans Semicond Manuf,2013
5. Yield improvement methodology with addressing design systematics during production ramp-up;Yin;2022 33rd Annu SEMI Adv Semicond Manuf Conf (ASMC),2022
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