Incident Angle Dependence in Polymer TOF-SIMS Depth Profiling with C60 Ion Beams

Author:

Iida Shin-ichi1,Miyayama Takuya1,Sanada Noriaki1,Suzuki Mineharu1,Fisher Gregory L.2,Bryan Scott R.2

Affiliation:

1. ULVAC-PHI, Inc., Japan

2. Physical Electronics, Inc., USA

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Reference14 articles.

1. [1] J. C. Vickerman and I. S. Gilmore (eds.), Surface Analysis —The Principal Techniques— (Wiley, 2009).

2. Extremely low sputtering degradation of polytetrafluoroethylene by C60 ion beam applied in XPS analysis

3. [3] T. Miyayama, N. Sanada, S. Iida, J. S. Hammond, and M. Suzuki, Appl. Surf. Sci. 255, 951 (2008).

4. [4] H.-G. Cramer, T. Grehl, F. Kollmer, R. Moellers, E. Niehuis, and D. Rading, Appl. Surf. Sci. 255, 966 (2008).

5. [5] G. L. Fisher, M. Dickinson, S. R. Bryan, and J. Moulder, Appl. Surf. Sci. 255, 819 (2008).

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