Effect of deposition conditions on physical properties of sputtered silicon oxynitride thin films on float glass-Reference-Cited by-同舟云学术

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Effect of deposition conditions on physical properties of sputtered silicon oxynitride thin films on float glass

Published:2018-03-08 Issue:3 Volume:9 Page:403-412
ISSN:2041-1286
Container-title:International Journal of Applied Glass Science
language:en
Short-container-title:Int J Appl Glass Sci

Author:

Šimurka Lukáš¹²^ORCID,Čtvrtlík Radim³,Roch Tomáš⁴,Turutoğlu Tuncay¹,Erkan Selen¹,Tomaštík Jan³,Bange Klaus⁵

Affiliation:

1. ŞİŞECAM Science and Technology Center; Gebze Turkey

2. Vitrum Laugaricio - Joint Glass Centre of the IIC SAS, TnU AD, and FChFT STU; Trenčín Slovakia

3. RCPTM, Joint Laboratory of Optics of Palacký University in Olomouc; Institute of Physics of the Czech Academy of Sciences; Olomouc Czech Republic

4. Department of Experimental Physics; Faculty of Mathematics, Physics and Informatics; Comenius University; Bratislava Slovakia

5. MK Consulting GmbH; Jugenheim Germany

Funder

Ministerstvo Školství, Mládeže a Tělovýchovy

Publisher

Wiley

Subject

General Materials Science

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/ijag.12346/fullpdf

Reference48 articles.

1. Conductivity and dielectric properties of silicon nitride thin films prepared by RF magnetron sputtering using nitrogen gas;Awan;Thin Solid Films,2003

2. Low temperature silicon dioxide by thermal atomic layer deposition: investigation of material properties;Hiller;J Appl Phys,2010

3. Recombination at the silicon nitride/silicon interface;Elmiger;J Vac Sci Technol A Vacuum, Surfaces, Film,1997

4. Metal-oxide-semiconductor interface and dielectric properties of atomic layer deposited SiO2 on GaN;Takashima;Jpn J Appl Phys,2013

5. Reactively sputtered silicon oxy-nitride films for solar absorber anti-reflection coatings;Wilson;Sol Energy Mater,1984

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Plasma emission spectroscopy and optical properties of reactive-sputtered silicon oxynitride films;Journal of Physics D: Applied Physics;2024-04-18

2. Effects of deposition temperature on the mechanical and structural properties of amorphous Al–Si–O thin films prepared by radio frequency magnetron sputtering;Thin Solid Films;2023-12

3. Intrinsic Mechanical Properties of Free-Standing SiN_x Thin Films Depending on PECVD Conditions for Controlling Residual Stress;ACS Applied Electronic Materials;2022-07-21

4. Critical Level of Nitrogen Incorporation in Silicon Oxynitride Films: Transition of Structure and Properties, toward Enhanced Anticorrosion Performance;ACS Applied Electronic Materials;2022-04-12

5. Nano- and micro-scale impact testing of zirconia, alumina and zirconia-alumina duplex optical coatings on glass;Wear;2020-12

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