Solid Yttria-Stabilized Zirconia Films by Pulsed Chemical Vapor Deposition from Metal-organic Precursors
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.2002.tb00549.x/fullpdf
Reference15 articles.
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2. Method and Apparatus for CVD Using Liquid Delivery System with Ultrasonic Nozzle Sono-Tek Corp 1986
3. On the Conversion Efficiency of Alkoxide Precursor into Oxide Films Grown by Ultrasonic Assisted, Pulsed Liquid Injection Metalorganic Chemical Vapor Deposition (Pulsed-CVD) Process;Krumdieck;J. Am. Ceram. Soc.,1999
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