Conversion Efficiency of Alkoxide Precursor to Oxide Films Grown by an Ultrasonic-Assisted, Pulsed Liquid Injection, Metalorganic Chemical Vapor Deposition (Pulsed-CVD) Process-Reference-Cited by-同舟云学术

Conversion Efficiency of Alkoxide Precursor to Oxide Films Grown by an Ultrasonic-Assisted, Pulsed Liquid Injection, Metalorganic Chemical Vapor Deposition (Pulsed-CVD) Process

Published:2004-12-21 Issue:6 Volume:82 Page:1605-1607
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:

Author:

Krumdieck Susan,Raj Rishi

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1999.tb01968.x/fullpdf

Reference13 articles.

1. Epitaxial LiTaO3 Thin Film by Pulsed Metalorganic Chemical Vapor Decomposition from a Single Precursor;Xie;Appl. Phys. Lett.,1993

2. Metalorganic Chemical Vapor Deposition by Pulsed Liquid Injection Using an Ultrasonic Nozzle: Titanium Dioxide on Sapphire from Titanium(IV) Isopropoxide;Versteeg;J. Am. Ceram. Soc.,1995

3. Structural Properties of Epitaxial TiO2 Films Grown on Sapphire (1120) by MOCVD;Chang;J. Mater. Res.,1992

4. Preparation and Characterization of MgO Thin Films Deposited by Spray Pyrolysis of Mg(2,4-pentanedionate)2;DeSisto;J. Crystal Growth,1991

5. Thin Layers Deposited by the Pyrosol Process;Blandenet;Thin Solid Films,1981

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