Control of ferroelectric and linear piezoelectric response of PZT films through texture
Author:
Affiliation:
1. Aerospace Engineering University of Illinois at Urbana‐Champaign Urbana Illinois
2. U.S. Army Research Laboratory Adelphi Maryland
3. General Technical Services Wall New Jersey
Funder
Army Research Office
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1111/jace.15419
Reference41 articles.
1. High-Resolution Piezo Inkjet Printhead Fabricated by Three Dimensional Electrical Connection Method using through Glass VIA
2. PZT-Based Piezoelectric MEMS Technology
3. Piezoelectric Films for Innovations in the Field of MEMS and Biosensors
4. PZT MEMS Actuated Flapping Wings for Insect-Inspired Robotics
5. {1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
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